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<strong>新聞資訊</strong> </div> <div class="mainbox"> <div class="newsShow"> <h2>為什么半導體車間都會安裝廢氣處理設備</h2> <h3> <span>文章來源：睿馳環保</span> <span>人氣：36 </span> <span>發表時間：2022-04-28</span></h3> <div class="newsShowBox" > <p> 為什么半導體車間都會安裝廢氣處理設備，因為半導體制造過程中使用的氣體大多具有可燃性、自燃性、腐蝕性等特性，尤其是在晶圓廠制造車間中的廢氣流通常含有腐蝕性和VOCS有機廢氣等，在排放到大氣之前通過VOCs廢氣處理設備去除這些氣體。這需要在大多數半導體廠制造車間中使用專門用于管理和處理工藝廢氣流的設備。因此我們睿馳提出安全可靠的廢氣處理裝置以及RTO蓄熱式焚燒設備，能夠對這些氣體進行有效處理。</p><p><br/></p><p>半導體車間廢氣處理設備選擇標準：</p><p><br/></p><p>(1)半導體生產車間廢氣處理設備的選擇是根據待消除氣體的種類、濃度、流量和壓力，減排設備的處理能力，綜合考慮農藥的壽命、前后與設備的關系等多種情況，挑選合適的處理方法和設備。</p><p><br/></p><p>(2)半導體生產車間廢氣處理設備在混合時將會爆炸、起火或造成有害物的氣體處理應該是一個獨立的系統。</p><p>(3)可能有自燃性氣體或可燃氣體流動的排風管道采用不燃材料。</p><p><br/></p><p>(4)不可以讓半導體生產車間廢氣處理設備規格中規定的廢氣以外的廢氣流動，或準許大量廢氣流動超出廢氣處理設備的處理水平。</p><p>??</p><p><br/></p><p><br/></p> </div> </div> <div class="fenyList"> <div class="prew">上一篇： <a href='http://www.v9stek.com/n/279.html'>為什么油氣回收設備需及時清理</a></div> <div class="nextw">下一篇： <a href='http://www.v9stek.com/n/281.html'>油氣回收裝置活性炭吸附法如何使用</a></div> 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